Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope

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Type E-Books
Language English
Total size 74.6 MB
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Date uploaded 2 years ago
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Infohash : 3B3A72401DC561AF6B27231B9A2A34D9C4F75CB1

Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope

https://CourseWikia.com

English | 24 May 2023 | ISBN-10: 9811992460 | 222 pages| Epub PDF (True) | 74 MB

This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding.
It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.

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                [ CourseWikia.com ] Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
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